Title:
WORK CLEANING METHOD
Document Type and Number:
WIPO Patent Application WO/2008/041445
Kind Code:
A1
Abstract:
An adhesive tape (T) is locally adhered by targeting a foreign material attached
to a substrate (w), i.e., a work, and the adhesive tape (T) is removed to transfer
the foreign material onto the adhesive tape (T) and the foreign material is removed
from the substrate (w). Preferably, a pressing member (26) is relatively shifted
along the substrate surface by pressing the adhesive tape (T) by the pressing
member (26) from a nonadhesive surface, and at the same time, the adhesive tape
(T) is adhered to the substrate (w) while feeding the tape from an adhesive tape
feeding means with the relative shift of the pressing member (26), and the adhesive
tape (T) is removed and recovered.
Inventors:
OKEYUI TAKUJI (JP)
OOUCHI KAZUO (JP)
NISHIDA YOSHIMASA (JP)
OOUCHI KAZUO (JP)
NISHIDA YOSHIMASA (JP)
Application Number:
PCT/JP2007/067410
Publication Date:
April 10, 2008
Filing Date:
September 06, 2007
Export Citation:
Assignee:
NITTO DENKO CORP (JP)
OKEYUI TAKUJI (JP)
OOUCHI KAZUO (JP)
NISHIDA YOSHIMASA (JP)
OKEYUI TAKUJI (JP)
OOUCHI KAZUO (JP)
NISHIDA YOSHIMASA (JP)
International Classes:
B08B1/00; A47L25/00; H01L21/304
Foreign References:
| JPS58182826A | 1983-10-25 | |||
| JPH07142440A | 1995-06-02 |
Attorney, Agent or Firm:
SUGITANI, Tsutomu (10-8 Nishitenma,1-chome, Kita-ku,Osaka-shi, Osaka 47, JP)
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