WORK HOLDING DISC FOR POLISHING, WORK POLISHING APPARATUS, AND WORK POLISHING METHOD

Title:

WORK HOLDING DISC FOR POLISHING, WORK POLISHING APPARATUS, AND WORK POLISHING METHOD

Document Type and Number:

WIPO Patent Application WO/2000/047368

Kind Code:

A1

Abstract:

A polishing work holding disc (1) including a work holding disc body (2) having a multiplicity of through holes (3) for vacuum-chucking a work (W), and a holding disc back plate (4) in close contact with the back face of the holding disc body (2) and having a vacuum groove (5). The holding disc back plate (4) is made of a synthetic resin and has an Asker C hardness of 70 to 98. Also disclosed are a work polishing apparatus and a work polishing method using such a work holding disc (1). The material of the holding disc back plate (4) is improved to enhance the contact with the holding disc body (2). Therefore deformation of the holding disc body (2) is not transferred to the work surface even if the polishing slurry enter and solidify. The polishing work holding disc (1) has a highly precise work holding face.

Inventors:

OKAMURA KOUICHI (JP)
SUZUKI FUMIO (JP)
MASUMURA HISASHI (JP)
MORITA KOUZI (JP)
TOYAMA NAOTAKA (JP)

Application Number:

PCT/JP2000/000618

Publication Date:

August 17, 2000

Filing Date:

February 04, 2000

Export Citation:

Click for automatic bibliography generation Help

Assignee:

SHINETSU HANDOTAI KK (JP)
OKAMURA KOUICHI (JP)
SUZUKI FUMIO (JP)
MASUMURA HISASHI (JP)
MORITA KOUZI (JP)
TOYAMA NAOTAKA (JP)

International Classes:

B24B37/27; B24B37/04; B24B37/30; H01L21/304; (IPC1-7): B24B37/04; B24B37/00; H01L21/304

Foreign References:

JPH09123059A	1997-05-13
JPS62165849U	1987-10-21

Other References: