Title:
WORKPIECE BATCH EXPOSURE METHOD AND DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/000708
Kind Code:
A1
Abstract:
A workpiece batch exposure method and device (1). The method and device (1) are applicable to workpieces (2), the surface of which has no positioning mark. In the provided workpiece batch exposure method and device (1), a fixed camera group (12) can simultaneously perform photographing and image detection on a batch of workpieces (2), which are arranged in an array; after edge contour information of each workpiece (2) is obtained on the basis of image information detection, offset information of the workpiece (2) and the deflection angle thereof are provided to an exposure apparatus (15); and after an exposure pattern is adjusted, exposure processing is performed.
Inventors:
CAI ZHIGUO (CN)
CHIANG CHUNLUNG (CN)
PU LIHONG (CN)
SHEN JUYING (CN)
WANG ZHI (CN)
CHIANG CHUNLUNG (CN)
PU LIHONG (CN)
SHEN JUYING (CN)
WANG ZHI (CN)
Application Number:
PCT/CN2022/107937
Publication Date:
January 04, 2024
Filing Date:
July 26, 2022
Export Citation:
Assignee:
CAIZ OPTRONICS CORP (CN)
International Classes:
G03F7/20
Foreign References:
| CN111999990A | 2020-11-27 | |||
| CN101986207A | 2011-03-16 | |||
| CN103616804A | 2014-03-05 | |||
| CN110333648A | 2019-10-15 | |||
| CN111965960A | 2020-11-20 | |||
| CN208270945U | 2018-12-21 | |||
| CN1763614A | 2006-04-26 | |||
| JP2021021816A | 2021-02-18 |
Attorney, Agent or Firm:
SUZHOU WISPRO INTELLECTUAL PROPERTY AGENCY (CN)
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