WORKPIECE CLEANING APPARATUS AND CLEANING METHOD

WIPO Patent Application WO/2021/103509

A1

The present invention relates to a workpiece cleaning apparatus and a cleaning method, the workpiece cleaning apparatus comprising a stand (1) and a plurality of cleaning troughs. The cleaning troughs are arranged in a line on the stand (1), and the plurality of cleaning troughs comprise, arranged from upstream to downstream in a working sequence, a molten salt cleaning trough (2) that uses molten salt to clean a workpiece, a first rinsing trough (5) that rinses the molten salt-cleaned workpiece, a rust removal cleaning trough (6) that uses a rust removal agent to clean the workpiece that has been rinsed in the first rinsing trough (5), a second rinsing trough (7) that rinses the workpiece that has undergone rust removal cleaning, and rust proofing cleaning trough (8) that uses a rust proofing solution to clean the workpiece that has been rinsed in the second rinsing trough (7).

JP4918770	Plate processing equipment and plate manufacturing method
WO/2013/025619	METHOD AND COMPOSITION FOR REMOVING RESIST, ETCH RESIDUE, AND COPPER OXIDE FROM SUBSTRATES HAVING COPPER, METAL HARDMASK AND LOW-K DIELECTRIC MATERIAL
WO/2003/059537	CLEANING METHOD AND CLEANING FLUID FOR AERATION BODIES

WANG GUANGCUN (CN)
ZONG XUEMEI (CN)
HE BING (CN)

PCT/CN2020/098043

June 03, 2021

June 24, 2020

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JIANGSU XCMG CONSTRUCTION MACHINERY RES INSTITUTE LTD (CN)

B08B3/08; C23G1/28

CN102732874A	2012-10-17
CN102732874A	2012-10-17
CN2312770Y	1999-04-07
CN109706465A	2019-05-03
CN107130236A	2017-09-05
CN204138778U	2015-02-04
CN203565859U	2014-04-30
US4333485A	1982-06-08
CN106868525A	2017-06-20

CCPIT PATENT AND TRADEMARK LAW OFFICE (CN)

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