Title:
WORKPIECE CUTTING METHOD AND JOINING MEMBER
Document Type and Number:
WIPO Patent Application WO/2018/203448
Kind Code:
A1
Abstract:
The present invention is a wire-saw-based workpiece cutting method in which a fixed abrasive particle wire, to the surface of which are bonded abrasive particles, is wrapped around a plurality of grooved rollers to form a wire array, and, while reciprocatingly running the fixed abrasive particle wire in the axial direction thereof, a workpiece held by a workpiece holding means via a joining member bonded to the workpiece is delivered toward and cut into by the wire array, thereby simultaneously cutting the workpiece at a plurality of locations along the axial direction thereof, wherein a joining member partially constituted by a grindstone is used so that, after the workpiece has finished being cut and before the workpiece is pulled away from the wire array, the fixed abrasive particle wire is abraded by the grindstone forming the joining member. As a result, a workpiece cutting method is provided that is capable of suppressing the formation of saw marks and the occurrence of wire breakage caused by the fixed abrasive particle wire catching on the workpiece when the wire is withdrawn after the workpiece has been cut.
Inventors:
TOYODA SHIRO (JP)
Application Number:
PCT/JP2018/010922
Publication Date:
November 08, 2018
Filing Date:
March 20, 2018
Export Citation:
Assignee:
SHINETSU HANDOTAI KK (JP)
International Classes:
B24B27/06; B24B53/00; B28D5/04; B28D7/04; H01L21/304
Foreign References:
| JP2010058249A | 2010-03-18 | |||
| JP2011031386A | 2011-02-17 | |||
| JPH11240008A | 1999-09-07 | |||
| JPS53114583A | 1978-10-06 |
Attorney, Agent or Firm:
YOSHIMIYA Mikio et al. (JP)
Download PDF: