Title:
WORKPIECE TRANSFER DEVICE FOR VACUUM MAGNETRON SPUTTERING COATER
Document Type and Number:
WIPO Patent Application WO/2023/024329
Kind Code:
A1
Abstract:
A workpiece transfer device for a vacuum magnetron sputtering coater. The workpiece transfer device for a vacuum magnetron sputtering coater comprises a mounting frame (10). A placement cavity (11) is formed in the mounting frame (10). At least one mounting roller (20) is provided in the placement cavity (11), and the mounting roller (20) is hollow. Both the outer surface and the inner surface of the mounting roller (20) are used for fixing workpieces. The workpiece transfer device for a vacuum magnetron sputtering coater further comprises a plurality of universal wheels (30), and the plurality of universal wheels (30) are all arranged at the bottom of the mounting frame. The workpiece transfer device for a vacuum magnetron sputtering coater can remarkably facilitate transfer of workpieces, thereby improving efficiency.
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Inventors:
ZHU HAISHENG (CN)
HUANG LE (CN)
SUN GUIHONG (CN)
LIANG HONG (CN)
HUANG GUOXING (CN)
TANG HONGBO (CN)
ZUO LI (CN)
HUANG LE (CN)
SUN GUIHONG (CN)
LIANG HONG (CN)
HUANG GUOXING (CN)
TANG HONGBO (CN)
ZUO LI (CN)
Application Number:
PCT/CN2021/137099
Publication Date:
March 02, 2023
Filing Date:
December 10, 2021
Export Citation:
Assignee:
XIANGTAN HONGDA VACUUM TECH CO LTD (CN)
International Classes:
C23C14/35; C23C14/50
Domestic Patent References:
| WO2009063788A1 | 2009-05-22 |
Foreign References:
| CN211256062U | 2020-08-14 | |||
| CN112281127A | 2021-01-29 | |||
| CN209481785U | 2019-10-11 | |||
| CN216155954U | 2022-04-01 | |||
| CN215590802U | 2022-01-21 | |||
| CN207159335U | 2018-03-30 | |||
| CN206368196U | 2017-08-01 | |||
| CN214140275U | 2021-09-07 |
Attorney, Agent or Firm:
CHANGSHA XINZHILI INTELLECTUAL PROPERTY AGENCY (GENERAL PARTNERSHIP) (CN)
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