Title:
X-RAY DEVICE AND METHOD FOR CONTROLLING X-RAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/124309
Kind Code:
A1
Abstract:
This X-ray device is provided with: a target that generates X-rays when it is irradiated with an electron beam; an electron beam source that emits the electron beam toward the target; an assessment unit that assesses the state of the target on the basis of information about the state of the electron beam; and a control unit that controls the electron beam source on the basis of the state of the target assessed by the assessment unit.
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Inventors:
SUZUKI KAZUAKI (JP)
YAMAMOTO MASASHI (JP)
NAKANISHI KOUSUKE (JP)
YAMAMOTO MASASHI (JP)
NAKANISHI KOUSUKE (JP)
Application Number:
PCT/JP2018/046351
Publication Date:
June 27, 2019
Filing Date:
December 17, 2018
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
H01J35/00; G01N23/046; H01J35/12; H05G1/00
Foreign References:
| JP2012526345A | 2012-10-25 | |||
| JPS52101375U | 1977-08-01 | |||
| JPS5730299A | 1982-02-18 | |||
| US4363971A | 1982-12-14 |
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
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