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Title:
X-RAY FLUORESCENCE ANALYZER, AND CONTROL METHOD FOR X-RAY FLUORESCENCE ANALYZER
Document Type and Number:
WIPO Patent Application WO/2021/256041
Kind Code:
A1
Abstract:
Provided are an X-ray fluorescence analyzer and a control method for the X-ray fluorescence analyzer that enable prevention of sample deterioration or damage and of contamination of the inside of the analyzer even when an abnormality occurs in the X-ray fluorescence analyzer. The present invention includes: a measurement unit that includes a movement mechanism that moves a sample between a standby position and a measurement position, an X-ray source that irradiates the sample with primary X-rays, a detector that measures the intensity of incoming fluorescent X-rays, and a first control unit that controls the operation of the movement mechanism and the X-ray source; and an information processing unit that includes an analysis unit that analyzes the sample on the basis of the intensity of the fluorescent X-rays measured by the detector, and a second control unit that communicates with the first control unit and that controls the measurement unit. The first control unit has an evacuation means for performing an evacuation control on the movement mechanism so as to evacuate the sample in the measurement position to the standby position when the communication between the first control unit and the second control unit is interrupted.

Inventors:
YAMAMOTO YOSHIHISA (JP)
YAMADA YASUJIRO (JP)
HARA SHINYA (JP)
Application Number:
PCT/JP2021/012325
Publication Date:
December 23, 2021
Filing Date:
March 24, 2021
Export Citation:
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Assignee:
RIGAKU DENKI CO LTD (JP)
International Classes:
G01N23/223; G01N23/2209
Domestic Patent References:
WO2015029144A12015-03-05
Foreign References:
JP2010217020A2010-09-30
JP2015203648A2015-11-16
JP2014145693A2014-08-14
JP2002139504A2002-05-17
Other References:
See also references of EP 4166938A4
Attorney, Agent or Firm:
HARUKA PATENT & TRADEMARK ATTORNEYS (JP)
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