X-RAY SPECTROSCOPIC ANALYSIS DEVICE AND CHEMICAL STATE ANALYSIS DEVICE USING SAID X-RAY SPECTROSCOPIC ANALYSIS DEVICE

Title:

X-RAY SPECTROSCOPIC ANALYSIS DEVICE AND CHEMICAL STATE ANALYSIS DEVICE USING SAID X-RAY SPECTROSCOPIC ANALYSIS DEVICE

Document Type and Number:

WIPO Patent Application WO/2019/064360

Kind Code:

A1

Abstract:

An X-ray spectroscopic analysis device (10) comprises: an excitation source (11) that irradiates a prescribed irradiation region (A) of a surface of a sample (S) with excitation rays for generating characteristic X-rays; a dispersive crystal (13) that is provided facing the irradiation region (A) and comprises a flat plate; a slit (12) that is provided between the irradiation region (A) and the dispersive crystal (13), and is parallel to the irradiation region (A) and a prescribed crystal plane of the dispersive crystal (13); an X-ray linear sensor (14) in which line-shaped detection elements (141) that are long in a direction parallel to the slit (12) are provided so as to line up in a direction perpendicular to the slit (12); and an energy calibration unit (16) that measures two characteristic X-rays with known energies by irradiating a surface of a standard sample with the excitation rays from the excitation source (11), said standard sample generating said two characteristic X-rays by being irradiated with the excitation rays, and on the basis of the energies of the two measured characteristic X-rays, calibrates the energies of characteristic X-rays detected by each of the detection elements (141) of the X-ray linear sensor (14). The energies of characteristic X-rays emitted by a sample for measurement can thus be calculated more accurately.

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Inventors:

SATO KENJI (JP)

Application Number:

PCT/JP2017/034860

Publication Date:

April 04, 2019

Filing Date:

September 27, 2017

Export Citation:

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Assignee:

SHIMADZU CORP (JP)

International Classes:

G01N23/207

Foreign References:

US20170160213A1	2017-06-08
JP2002189004A	2002-07-05
JP2009264926A	2009-11-12
JPH10318945A	1998-12-04
JP2013096750A	2013-05-20
JPS59222747A	1984-12-14