Title:
X-Y STAGE YAW CORRECTION METHOD AND X-Y STAGE
Document Type and Number:
WIPO Patent Application WO/2022/131728
Kind Code:
A1
Abstract:
Disclosed in the present application is an X-Y stage yaw correction method, wherein the method may comprise the steps of: moving an X-Y moving body in an X axis or Y axis direction by using a driver; measuring yaw, which is a rotational variation, of the moved X-Y moving body by using a sensor; calculating, by a controller, a rotational stiffness value to be corrected, by using measured yaw data; and adding to the X-Y stage yaw correction flexures having a stiffness corresponding to the rotational stiffness value to be corrected.
Inventors:
KANG DONG WOO (KR)
KIM HYUN CHANG (KR)
KIM JAE YOUNG (KR)
KIM KYUNG ROK (KR)
KIM HYUN CHANG (KR)
KIM JAE YOUNG (KR)
KIM KYUNG ROK (KR)
Application Number:
PCT/KR2021/018908
Publication Date:
June 23, 2022
Filing Date:
December 13, 2021
Export Citation:
Assignee:
KOREA INST MACH & MATERIALS (KR)
International Classes:
B23Q1/44; F16M11/12; F16M11/18; H02N2/00; H02N2/04
Foreign References:
| JP2006322714A | 2006-11-30 | |||
| KR20030094887A | 2003-12-18 | |||
| KR20200094879A | 2020-08-10 | |||
| KR101066846B1 | 2011-09-26 | |||
| JP2009052985A | 2009-03-12 |
Attorney, Agent or Firm:
HONESTY & JR PARTNERS INTELLECTUAL PROPERTY LAW GROUP (KR)
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