Title:
YTTRIUM-BASED PROTECTIVE FILM, METHOD FOR PRODUCING SAME, AND MEMBER
Document Type and Number:
WIPO Patent Application WO/2023/157849
Kind Code:
A1
Abstract:
The present invention relates to an yttrium-based protective film which has a Y5O4F7 peak intensity ratio of 60% or more in an X-ray diffraction pattern, a porosity of less than 1.5% by volume, and a Vickers hardness of 500 MPa or more.
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Inventors:
ISHIKAWA MICHIO (JP)
TANIMURA MICHIO (JP)
OGAWA SHUHEI (JP)
OGAWA TOMONORI (JP)
TANIMURA MICHIO (JP)
OGAWA SHUHEI (JP)
OGAWA TOMONORI (JP)
Application Number:
PCT/JP2023/005071
Publication Date:
August 24, 2023
Filing Date:
February 14, 2023
Export Citation:
Assignee:
AGC INC (JP)
TSUBASA SCIENCE CORP (JP)
TSUBASA SCIENCE CORP (JP)
International Classes:
C23C14/06; C23C16/44; H01L21/316
Domestic Patent References:
| WO2018083854A1 | 2018-05-11 | |||
| WO2017115662A1 | 2017-07-06 |
Foreign References:
| JP2019147995A | 2019-09-05 | |||
| JP2020525640A | 2020-08-27 | |||
| JP2018190983A | 2018-11-29 | |||
| JP2019019413A | 2019-02-07 | |||
| JP2021077899A | 2021-05-20 | |||
| JP3224084U | 2019-11-21 |
Other References:
LEE SEUNGJUN, LEE JAEHOO, HWANG NONGMOON: "Effect of the Dispersion State in Y5O4F7 Suspension on YOF Coating Deposited by Suspension Plasma Spray", COATINGS, vol. 11, no. 7, 9 July 2021 (2021-07-09), pages 831, XP093084816, DOI: 10.3390/coatings11070831
LEE JAEHOO, LEE SEUNGJUN, HAN HEUNG NAM, KIM WOONGSIK, HWANG NONG-MOON: "Yttrium Oxyfluoride Coatings Deposited by Suspension Plasma Spraying Using Coaxial Feeding", COATINGS, vol. 10, no. 5, 16 May 2020 (2020-05-16), pages 481, XP093084819, DOI: 10.3390/coatings10050481
LEE JAEHOO, LEE SEUNGJUN, HAN HEUNG NAM, KIM WOONGSIK, HWANG NONG-MOON: "Yttrium Oxyfluoride Coatings Deposited by Suspension Plasma Spraying Using Coaxial Feeding", COATINGS, vol. 10, no. 5, 16 May 2020 (2020-05-16), pages 481, XP093084819, DOI: 10.3390/coatings10050481
Attorney, Agent or Firm:
EIKOH, P.C. (JP)
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