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WO/2002/012906A1 |
The invention relates to a micromechanical component, comprising a substrate and a movable structure (2) which is located on the surface of said substrate. Said movable structure (2) can be moved parallel to the surface of the substrate ...
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WO/2002/011189A2 |
A method of making a micro electro-mechanical switch or tunneling sensor. A cantilevered beam structure and a mating structure are defined on a first substrate or wafer; and at least one contact structure and a mating structure are defin...
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WO/2001/055674A2 |
The present invention is for a vibration-type micro-gyroscope. The micro-gyroscope according to the present invention has an inner driving gimble and an outer detecting gimble. The inner gimble is driven by electrostatic force and the ou...
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WO/2001/023837A1 |
The invention relates to a micromechanical rotation rate sensor, comprising the following: a substrate (100) which has an anchoring device (21; 21'), the latter being located on said substrate; and a ring-shaped centrifugal mass (10) whi...
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WO/2001/024228A2 |
A micro machined structure includes one or more temporary bridges for temporarily coupling the micro machined structure to a support structure.
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WO/2001/023300A1 |
The method of the present invention provides a process for manufacturing MEMS devices having more precisely defined mechanical and/or electromechanical members. The method of the present invention begins by providing a partially sacrific...
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WO/2001/020257A2 |
An angular rate sensing gyroscope which includes voltage pick-off conductors (50) which are applied to an area of a surface of a piezoelectric resonating element (10) that is subject to substantially zero stress when the gyroscope is rot...
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WO/2001/004638A1 |
The present invention provides merged-mask processes for fabricating micro-machined devices in general and mirrored assemblies for use in optical scanning devices in particular. The process includes (a) providing a substrate having a pre...
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WO/2000/075676A1 |
The invention relates to a device for determining frequency and/or amplitude of an oscillating structure that is especially used in measuring acceleration or rotational rates. Said device has a movable element (2) that can be excited to ...
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WO/2000/061413A1 |
The invention relates to a method for monitoring or influencing the movement of a vehicle on a path. According to said method, a desired path (40) and an actual movement (41) of the vehicle are determined, said desired path and said actu...
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WO/2000/053472A1 |
The invention relates to a system for regulating the stability of a motor vehicle, especially land craft, with a yaw rate sensor (GRS) which produces upon operation a first output signal (GR) representative of the yaw rate of a motor veh...
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WO2000013210A9 |
A monolithically fabricated micromachined structure couples a reference frame (56) to a dynamic plate (58). Performance of torsional oscillators or scanners benefits greatly by coupling the frame (56) to the plate (58) with folded torsio...
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WO/1999/049506A1 |
There is disclosed a method of manufacturing a micromechanical device. The method comprises the steps of: (a) etching a substrate (1), having a mask (2) thereon, through an opening in the mask to a desired depth to form a trench (6) havi...
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WO/1999/035477A1 |
The invention relates to a component having at least one micromechanical surface structure structured on a silicon substrate and a capping wafer which covers the at least one surface structure. The invention provides for the capping wafe...
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WO/1998/044571A1 |
An improved micromachined structure used for beam scanners, gyroscopes, etc. includes a reference member (154, 54) from which project a first pair of axially aligned torsion bars (156, 56). A first dynamic member (54 or 52), coupled to a...
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WO/1998/008054A1 |
The invention concerns a sensor for measuring yaw, pitch or roll movements which is used in particular in motor vehicle control systems. The sensor comprises an annular hollow body (1, 2, 4) in which a magnetic fluid (MF) is located. The...
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WO/1998/000721A1 |
A magnetohydrodynamic sensor having an annular sense channel containing a conductive liquid proof mass (11, 12). A radial flow is introduced into the annular channel (14) which, in response to rotation of the device, produces a coriolis ...
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WO/1997/047977A1 |
A method for designing a sensor using a dual double-ended tuning forks (20, 22) which provides composite cancellation of second-order non-linearity terms.
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WO/1997/047485A1 |
Proposed is a method of controlling the handling of a vehicle, the method calling for at least the vehicle weight (G) and the instantaneous location of the centre of gravity (SP) to be determined from tyre-sensor signals. In a further em...
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WO/1997/037232A2 |
A method and apparatus (1) for measuring acceleration of a moving object. A body capable of transmitting pulses of energy is applied to the moving object, so as to be carried thereby and to move therewith. A pulse of said energy is trans...
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WO/1997/014934A1 |
A pendulous oscillating gyroscope and accelerometer (10a) comprising a fixed case (22a); a servo driven member (16a) mounted to the case for oscillation about a servo axis (C); a torque summing member (14a) mounted to the servo driven me...
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WO/1997/006441A1 |
A pendulous oscillating gyroscopic accelerometer (10) comprising an unbalanced pendulous mass (28), pivotable on an output axis, that is oscillated about a reference axis transverse to the output axis. The pendulous mass (28) is also osc...
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WO/1997/002972A1 |
For acquiring and evaluating measured variables which are critical for safety, e.g. yaw rates (GR), as input variables of a motor vehicle control system, the measured variables are obtained by means of two mutually independent measuring ...
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WO/1996/038710A1 |
A micromechanical rotation speed sensor based on the principle of Coriolis contains two flat, mutually flush and superimposed oscillators (1, 2) that may be electrostatically made to oscillate with contrary phases on flat support structu...
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WO/1995/026285A1 |
The circuit described for processing the signals from a yaw-rate sensor (11) is intended particularly for controlling the stability of a motor vehicle (1). The circuit has a control unit (18) to which are fed the signals from the yaw-rat...
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WO/1995/013545A1 |
A micromachined push-pull accelerometer formed with dual vibrating beam transducers in one plane of a silicon substrate includes a pair of proof masses or pendulums supported by flexures formed in a plane adjacent a surface of the silico...
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WO/1992/009897A1 |
A magnetohydrodynamic angular rate sensor is described. A housing (30) supports first and second fluid proof masses in respective coaxial annular channels (11, 17), permitting relative motion between the proof masses and the housing. Fir...
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WO/1992/001941A1 |
Proposed is a rotational-speed sensor produced from a mono-crystalline silicon wafer and having at least a pair of oscillators which are connected by one or more strips to a fixed frame. The osciallators can oscillate in two mutually per...
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WO/1990/015335A1 |
A sensor (10) for determining angular velocity ($g(V)) comprises a piezoelectric shearing oscillator (12) which functions as an emitter. Ultrasonic waves generated by the oscillator travel along a sound conductor to two receivers (14, 15...
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WO/1990/007124A1 |
Sensor (10) for determining angular velocity, in which one or more piezoelectric plates (11, 12, 31 to 34) suitably orientated with respect to the axis of rotation are made to oscillate transversely by an excitation circuit. If the senso...
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WO/1989/005459A2 |
A device for measuring acceleration is useful for measuring changes of motion with selective sensitivity along three coordinate axes. In order to determine multidimensional changes of motion, three micromechanical sensors each sensitive ...
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WO/1987/002469A1 |
Method and apparatus for processing signals supplied by accelerometer assemblies (12) in which one or more accelerometers are cyclically displaced in a predetermined manner so that signals representing the specific force experienced by t...
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WO/1987/002140A1 |
A process for measuring the speeds of rotation of at least two perpendicular axes. A gyro laser (1), for example, is rotated around an auxiliary axis of rotation (3) at the speed of rotation omegao and the initial value of the gyro laser...
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JP2014176964A |
To provide a structure that is improved in a microfabrication member connected by a torsion flexure hinge and relatively rotated.A reference frame 56 is connected to a dynamic plate 58, and a frame 56 is connected to the plate 58 with a ...
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JP5457993B2 |
A drive component that comprises a drive axis, a pendulous sensor component that comprises a center of mass, and a hinge component that comprises a rotation axis of an electromechanical system. The drive component makes a determination o...
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JP5343062B2 |
A monolithically fabricated micromachined structure (52) couples a reference frame (56) to a dynamic plate (58) or second frame for rotation of the plate (58) or second frame with respect to the reference frame (56). Performance of torsi...
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JP2013099843A |
To provide an improved structure of a micromachined member coupled with a torsional flexure hinge and relatively rotating.A reference frame is coupled to a dynamic plate 58, and the frame is coupled to the plate 58 by not a torsion bar b...
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JP2012091317A |
To enhance stability of a bonded surface micromechanical component, by maintaining an outside chip dimension unchangeable as much as possible, by maintaining excellent vacuum sealing.This micromechanical cap structure includes a substrat...
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JP4851036B2 |
The present invention provides merged-mask processes for fabricating micromachined devices in general and mirrored assemblies for use in optical scanning devices in particular. A method of fabricating a three dimensional structure, compr...
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JP2011247789A |
To provide a vibration gyro which is low in height for reducing an error signal with respect to acceleration in an X-axial direction, and for detecting the angular speeds of a plurality of axes including a Z axis.The vibration gyro for d...
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JP2011242143A |
To provide a physical quantity sensor which can accurately detect physical quantity such as angular velocity and acceleration by removing influence such as vibration propagated from the outside to a detection element which detects physic...
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JP2011242257A |
To provide a vibration gyro that is smaller in size than a conventional one and detects angular velocity with high accuracy.In a vibration gyro 50, supports (21) of fixing structure portions for detection 2A and 2B are arranged between d...
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JP2011242256A |
To provide a vibration gyro which is capable of suppressing mixture of an unnecessary signal in a detection signal even when shear strain acts on a package.A vibration gyro 50 includes a vibrator 1 and a lid plate 50A. The vibrator 1 inc...
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JP2011237265A |
To provide a dynamic quantity sensor in which a connection strength between a sensor chip and a substrate is improved and an increase of a physical constitution of a dynamic quantity sensor is suppressed.The dynamic quantity sensor compr...
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JP2011232168A |
To provide a navigation device which can use pictures from a camera for the use other than for map matching between map information and a vehicle location.The navigation device comprises: a rear camera 24 which takes a picture around a v...
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JP2011232166A |
To provide a fixing structure for fixing a physical quantity detection part which detects physical quantity regarding rotation to a substratum, and capable of selectively transfer rotation which is an object to be detected to the physica...
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JP2011226928A |
To provide a physical quantity sensor element piece, a physical quantity sensor element, and a physical quantity sensor each capable of highly accurately detecting physical quantity (e.g. velocity, acceleration and the like) while reduci...
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JP2011226941A |
To provide a force detection sensor with a simple configuration, low power consumption, low cost, and high response speed.A vibration-type force detection sensor 1 comprises a piezoelectric substrate, a piezoelectric resonator element 10...
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JP2011226875A |
To provide a small angular velocity sensor which allows to be installed on an inclined surface.The angular velocity sensor includes: a case 21; an IC 27 provided in the inner bottom surface of the case 21; a base 29 having an inclined su...
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JP4809848B2 |
A method of creating a predefined internal pressure within a cavity of a semiconductor device, the method including providing the semiconductor device, the semiconductor device including a semiconductor oxide area which is continuously a...
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