Title:
真空ポンプ
Document Type and Number:
Japanese Patent JP2012525534
Kind Code:
A
Abstract:
A multi stage vacuum pump for pumping corrosive fluid with a first flow section of material less resistant to corrosion than the material of a second flow section downstream of the first flow section.
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Inventors:
Okoro for Emmanuel Uzoma
Application Number:
JP2012507816A
Publication Date:
October 22, 2012
Filing Date:
March 31, 2010
Export Citation:
Assignee:
Edwards Limited
International Classes:
F04C25/02; F04B37/16; F04C23/00
Domestic Patent References:
| JP2004100593A | 2004-04-02 | |||
| JP2004100593A | 2004-04-02 |
Foreign References:
| DE3710782A1 | 1988-10-20 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Kazushige Tanzawa
Sadao Kumakura
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Kazushige Tanzawa