Document Type and Number:
Japanese Patent JP2014172178
Kind Code:
A5
Application Number:
JP2013043531
Publication Date:
April 14, 2016
Filing Date:
March 05, 2013
Export Citation:
International Classes:
B41J2/045; B41J2/055; B41J2/16; H01L41/047; H01L41/09; H01L41/29