Title:
SURFACE ROUGHNESS MEASUREMENT SYSTEM
Document Type and Number:
Japanese Patent JP2018136149
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a surface roughness measurement system capable of obtaining an accurate measurement result without being affected by vibration transmitted to a work.SOLUTION: The surface roughness measurement system is provided with a drive unit 12 that measures a roughness of a work W and another drive unit 14 that measures the vibration of the work W. From surface roughness data obtained by the drive unit 12, vibration data measured by the drive unit 14 is removed. It is thus possible to obtain an accurate measurement result by removing the vibration transmitted to the work W.SELECTED DRAWING: Figure 1
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Inventors:
ENOMOTO MASAHITO
Application Number:
JP2017029232A
Publication Date:
August 30, 2018
Filing Date:
February 20, 2017
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
G01B5/28; G01B21/30
Attorney, Agent or Firm:
Kenzo Matsuura