Title:
SUBSTRATE HOLDING DEVICE AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2019009358
Kind Code:
A
Abstract:
To provide a substrate holding device and a manufacturing method thereof in which generation of particles is greatly suppressed.SOLUTION: A substrate holding device 10 includes a flat base body 11 that is made of a ceramic sintered body and a plurality of protrusions 20 that protrudes from the main surface PL1 of the base body 11 and in which the top surface 20T constitutes a mounting surface 11A of a substrate W. The plurality of protrusions 20 have a plurality of laser marks LM formed on the side surface 20S of the plurality of protrusions 20 and linearly extending from the top surface 20T toward the main surface PL1 of the base body 11.SELECTED DRAWING: Figure 6A
Inventors:
IWABUCHI ATSUHISA
ISHINO TOMOHIRO
ISHINO TOMOHIRO
Application Number:
JP2017125620A
Publication Date:
January 17, 2019
Filing Date:
June 27, 2017
Export Citation:
Assignee:
NGK SPARK PLUG CO
International Classes:
H01L21/683
Domestic Patent References:
| JP2012119378A | 2012-06-21 | |||
| JP2007207840A | 2007-08-16 | |||
| JP2005019700A | 2005-01-20 |
Foreign References:
| WO2017170738A1 | 2017-10-05 |
Attorney, Agent or Firm:
Creation International Patent Office