Title:
【発明の名称】半導体装置の作製方法
Document Type and Number:
Japanese Patent JP3359794
Kind Code:
B2
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Inventors:
Shunpei Yamazaki
Mitsunori Sakama
Yasuhiko Takemura
Mitsunori Sakama
Yasuhiko Takemura
Application Number:
JP23074295A
Publication Date:
December 24, 2002
Filing Date:
August 16, 1995
Export Citation:
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
H01L21/324; H01L21/316; H01L21/336; H01L29/786; (IPC1-7): H01L21/336; H01L21/316; H01L29/786
Domestic Patent References:
| JP6124889A | ||||
| JP6124890A | ||||
| JP794756A | ||||
| JP6181178A | ||||
| JP5343336A | ||||
| JP393273A | ||||
| JP6140392A | ||||
| JP5218405A |
Other References:
【文献】欧州特許出願公開612102(EP,A1)