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Title:
【発明の名称】サブストレートのコーティング装置
Document Type and Number:
Japanese Patent JP3431174
Kind Code:
B2
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Inventors:
Karl Matre
Application Number:
JP20533391A
Publication Date:
July 28, 2003
Filing Date:
August 16, 1991
Export Citation:
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Assignee:
Leibold Optics Gezel Shaft Mitt Beschlenktel Haftung
International Classes:
C23C14/34; C23C14/24; C23C14/32; (IPC1-7): C23C14/24; C23C14/32
Domestic Patent References:
JP6362872A
JP4235276A
Attorney, Agent or Firm:
Toshio Yano (3 outside)



 
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