Title:
強誘電体薄膜の製造方法
Document Type and Number:
Japanese Patent JP4075120
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a dense ferroelectric thin film which is grainless, in a film thickness direction. SOLUTION: A ferroelectric thin film comprises a burned laminate 10. The laminate 10 includes a Bi seed layer 11 and a Bi-contained ferroelectric layer 13 provided, making contact with the layer 11. In the layer 13, crystallization is advanced by burning from the side of the layer 13 which makes contact with the layer 11. For this reason, the laminate 10 becomes mono-crystal in the film thickness direction. As a result, the ferroelectric thin film (burned laminate 10) turns grainless and dense in the film thickness direction.
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Inventors:
Ichiro Koiwa
Yukihisa Okada
Takao Kanehara
Hiroyo Kato
Yukihisa Okada
Takao Kanehara
Hiroyo Kato
Application Number:
JP128198A
Publication Date:
April 16, 2008
Filing Date:
January 07, 1998
Export Citation:
Assignee:
Oki Electric Industry Co., Ltd.
International Classes:
C01G29/00; H01L21/8242; H01B3/12; H01L21/316; H01L21/822; H01L21/8246; H01L21/8247; H01L27/04; H01L27/10; H01L27/105; H01L27/108; H01L29/788; H01L29/792
Domestic Patent References:
| JP9260516A | ||||
| JP9246408A | ||||
| JP9153597A | ||||
| JP9282943A | ||||
| JP10200059A | ||||
| JP11092266A | ||||
| JP10007495A |
Attorney, Agent or Firm:
Takashi Ogaki