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Title:
レジスト剥離液組成物
Document Type and Number:
Japanese Patent JP4300400
Kind Code:
B2
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Inventors:
Hideki Shimizu
Shu Oto
Application Number:
JP2003001569A
Publication Date:
July 22, 2009
Filing Date:
January 07, 2003
Export Citation:
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Assignee:
Mitsubishi Gas Chemical Co., Ltd.
International Classes:
G03F7/42; H01L21/027; H01L21/304
Domestic Patent References:
JP64015740A
JP2002303993A
JP2004536175A
JP2003528353A
JP2001083713A
JP2001015480A
JP2002357908A
Foreign References:
WO2002102952A1
WO2001071429A1
Attorney, Agent or Firm:
Takashi Nagai



 
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