真空処理方法

Title:

真空処理方法

Document Type and Number:

Japanese Patent JP4549004

Kind Code:

B2

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Inventors:

Takahisa Taniguchi
Kazutaka Akiyama
Toshiyasu Shirasuna
Yoshio Segi

Application Number:

JP2002022009A

Publication Date:

September 22, 2010

Filing Date:

January 30, 2002

Export Citation:

Assignee:

Canon Inc

International Classes:

C23C16/455

Domestic Patent References:

Attorney, Agent or Firm:

Akio Miyazaki
Ishibashi Masayuki
Masaaki Ogata

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