Title:
超音波処理装置用供給液の製造装置、超音波処理装置用供給液の製造方法及び超音波処理システム
Document Type and Number:
Japanese Patent JP5222059
Kind Code:
B2
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Inventors:
Michio Yoshizawa
Takayuki Imaoka
Takayuki Imaoka
Application Number:
JP2008210773A
Publication Date:
June 26, 2013
Filing Date:
August 19, 2008
Export Citation:
Assignee:
Organo Corporation
International Classes:
B08B3/12; B01D19/00; B01D61/00; B01F1/00; B01F5/06; B08B3/10; C02F1/20
Domestic Patent References:
| JP10109073A | ||||
| JP2007173677A | ||||
| JP10165909A | ||||
| JP11077021A | ||||
| JP2001157879A | ||||
| JP2004281728A |
Attorney, Agent or Firm:
Kenji Yoshida
Jun Ishida
Jun Ishida
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