Title:
ウェーハの位置決め方法およびその装置
Document Type and Number:
Japanese Patent JP5496710
Kind Code:
B2
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Inventors:
Haruyuki Hirayama
Application Number:
JP2010047134A
Publication Date:
May 21, 2014
Filing Date:
March 03, 2010
Export Citation:
Assignee:
Koyo Machine Industry Co., Ltd.
International Classes:
H01L21/68
Domestic Patent References:
| JP5251546A | ||||
| JP1214041A | ||||
| JP649634A |
Attorney, Agent or Firm:
Shogo Sano
Kiyoshi Samukawa
Kiyoshi Samukawa