Title:
感活性光線性又は感放射線性樹脂組成物、並びにそれを用いた感活性光線性又は感放射線性膜及びパターン形成方法
Document Type and Number:
Japanese Patent JP5663409
Kind Code:
B2
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Inventors:
椿 英明
平野 修史
横川 夏海
平野 修史
横川 夏海
Application Number:
JP2011127669A
Publication Date:
February 04, 2015
Filing Date:
June 07, 2011
Export Citation:
Assignee:
富士フイルム株式会社
International Classes:
G03F7/004; G03F7/039; H01L21/027
Attorney, Agent or Firm:
Masatoshi Kurata
Shigeo Takakura
Kono 哲
Makoto Nakamura
Toshihiro Fukuhara
Peak Takashi
Toshiro Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Yukinaga Yasujiro
Naoki Kono
Sunagawa 克
Iseki Mamoru 3
Tatsushi Sato
Okada Kishi
Mihoko Horiuchi
Masanori Takeuchi
Shigeo Takakura
Kono 哲
Makoto Nakamura
Toshihiro Fukuhara
Peak Takashi
Toshiro Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Yukinaga Yasujiro
Naoki Kono
Sunagawa 克
Iseki Mamoru 3
Tatsushi Sato
Okada Kishi
Mihoko Horiuchi
Masanori Takeuchi
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