Title:
ターボ分子ポンプ
Document Type and Number:
Japanese Patent JP5738869
Kind Code:
B2
Abstract:
An object of the present invention is to enhance the capacity of a turbomolecular pump. A turbomolecular pump is a composite-type vacuum pump that combines a blade portion and a thread groove portion. Openings are formed at a joint portion between a rotor blade holding portion that holds rotor blades and a stepped portion that holds a rotor cylinder portion, such that the openings span both the rotor blade holding portion and the stepped portion. Part of the gas that is evacuated by the blade portions is evacuated by a thread groove portion that is formed of the rotor cylinder portion and a stator thread groove, and the rest of the gas is led into the rotor cylinder portion via the openings, and is evacuated by a thread groove portion that is formed of the rotor cylinder portion and another stator thread groove. Stress derived from rotation of a rotor can be withstood when the openings are formed at the joint portion between the rotor blade holding portion and the stepped portion. Moreover, a groove in which a balancer weight is disposed is provided at a clearance portion that lies further on the inlet port side of the other stator thread groove, thereby eliminating the necessity of shortening the length of the other stator thread groove.
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Inventors:
Yuyuki Sakaguchi
Toru Miwada
Akihiko Wada
Toru Miwada
Akihiko Wada
Application Number:
JP2012532900A
Publication Date:
June 24, 2015
Filing Date:
July 20, 2011
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D19/04
Domestic Patent References:
| JPH0538389U | 1993-05-25 | |||
| JPH046593U | 1992-01-21 | |||
| JPS63147989A | 1988-06-20 |
Foreign References:
| US20050244219A1 | 2005-11-03 | |||
| US20100215475A1 | 2010-08-26 | |||
| US20040096311A1 | 2004-05-20 |
Attorney, Agent or Firm:
Hitoshi Nakano
Takashi Kawai
Takashi Kawai