Title:
エンコーダ装置、及び駆動装置
Document Type and Number:
Japanese Patent JP5842334
Kind Code:
B2
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Inventors:
Toru Imai
Kiji Takahashi
Kiichiro Yamabe
Kiji Takahashi
Kiichiro Yamabe
Application Number:
JP2011024036A
Publication Date:
January 13, 2016
Filing Date:
February 07, 2011
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01D5/244
Domestic Patent References:
| JP201113006A | ||||
| JP2009180522A | ||||
| JP2006146090A | ||||
| JP11304405A | ||||
| JP201096708A | ||||
| JP2010145203A | ||||
| JP5614908A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Kazuya Nishi
Tadashi Takahashi
Kazuya Nishi