Title:
アーク蒸発源
Document Type and Number:
Japanese Patent JP6403269
Kind Code:
B2
Abstract:
Provided is an arc evaporation source capable of stably retaining an arc spot on the front end surface of a target and apparatus downsizing. An arc evaporation source 1 includes a target 3 to be melted and vaporized from its front end surface 3a by arc discharge and at least one magnet 4 disposed at a position apart from a side surface 3b of the target 3 radially of the target 3. The magnet 4 is disposed to form a magnetic field MF1 satisfying conditions a) and b) below, on the side surface 3b of the target 3, in a region of up to 10 mm from the front end surface 3a of the target 3 axially of the target 3: a) an angle which magnetic lines of force of the magnetic field forms with the side surface 3b of the target 3 is 45 degrees or less; and b) a component of the strength of the magnetic lines of force along the axial direction of the target 3 is 200 G or more.
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Inventors:
Yoshinori Kurokawa
Satoshi Hirota
Shinichi Tanifuji
Satoshi Hirota
Shinichi Tanifuji
Application Number:
JP2015036107A
Publication Date:
October 10, 2018
Filing Date:
February 26, 2015
Export Citation:
Assignee:
KABUSHIKI KAISHA KOBE SEIKO SHO
International Classes:
C23C14/24; H05H1/48
Domestic Patent References:
| JP2012188730A | ||||
| JP2012188732A | ||||
| JP2005002454A | ||||
| JP2001152319A | ||||
| JP2007070690A |
Foreign References:
| WO2013191038A1 |
Attorney, Agent or Firm:
Etsushi Kotani
Masataka Otani
Muramatsu Toshiro
Masataka Otani
Muramatsu Toshiro