Title:
塗布膜形成方法、塗布膜形成装置及び記憶媒体
Document Type and Number:
Japanese Patent JP6465000
Kind Code:
B2
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Inventors:
Kosuke Yoshihara
Takafumi Niwa
Takafumi Niwa
Application Number:
JP2015224193A
Publication Date:
February 06, 2019
Filing Date:
November 16, 2015
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027; B05C9/12; B05C9/14; B05C11/08; B05D1/40; B05D3/00; B05D3/04
Domestic Patent References:
| JP2008060462A | ||||
| JP11260717A | ||||
| JP2015009180A | ||||
| JP2003037053A | ||||
| JP58114763A | ||||
| JP8281184A |
Attorney, Agent or Firm:
Patent Corporation Yayoi Patent Office
Toshio Inoue
Tomoaki Miida
Toshio Inoue
Tomoaki Miida