Document Type and Number:
Japanese Patent JPS4884579
Kind Code:
A
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Application Number:
JP1496272A
Publication Date:
November 09, 1973
Filing Date:
February 12, 1972
Export Citation:
International Classes:
H01L27/04; H01L21/822; H01L27/01
Other References:
ELECTRONICS=1966
ELECTRONICS=1967
ELECTRONICS=1967