Document Type and Number:
Japanese Patent JPS4916394
Kind Code:
A
More Like This:
| JPS54159170 | TOOL FOR WAFER PROCESSING |
| JP7149378 | Heat treatment equipment |
| JPH0646624 | [Title of Invention] Heat treatment apparatus |
Application Number:
JP4961372A
Publication Date:
February 13, 1974
Filing Date:
May 18, 1972
Export Citation:
International Classes:
H01L21/22; H01L33/30; H01L33/40; H01L33/56; H01L33/58; H01L21/223; (IPC1-7): H01L21/223