Document Type and Number:
Japanese Patent JPS5727878
Kind Code:
B2
Application Number:
JP6789374A
Publication Date:
June 12, 1982
Filing Date:
June 13, 1974
Export Citation:
International Classes:
C30B19/00; C30B19/12; C30B25/04; C30B29/40; H01L21/208; H01S5/00