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Document Type and Number:
Japanese Patent JPS5727879
Kind Code:
B2
More Like This:
JPS5460291PROCESS FOR DEPOSITING THIN FILM OF CRYSTALLINE SILICON ON GRAPHITE BASEE MATERIAL
JPS5526635COMPOUND SEMICONDUCTOR CRYSTAL GROWTH METHOD
Application Number:
JP184575A
Publication Date:
June 12, 1982
Filing Date:
December 24, 1974
Export Citation:
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International Classes:
C30B19/00; C30B19/06; H01L21/02; H01L21/208; (IPC1-7): C30B19/06; H01L21/02



 
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