Title:
半導体装置及び半導体装置の製造方法
Document Type and Number:
Japanese Patent JPWO2012176503
Kind Code:
A
Inventors:
Shiro Hino
Narihisa Miura
Akihiko Furukawa
Nakao 之泰
Watanabe 友勝
Many 留谷 Masayoshi
Shrimp pond History of 勇
Masayuki Imaizumi
Aya 淳
Narihisa Miura
Akihiko Furukawa
Nakao 之泰
Watanabe 友勝
Many 留谷 Masayoshi
Shrimp pond History of 勇
Masayuki Imaizumi
Aya 淳
Application Number:
JP2012055792W
Publication Date:
February 23, 2015
Filing Date:
March 07, 2012
Export Citation:
Assignee:
Mitsubishi Electric Corp.
International Classes:
H01L29/417; H01L29/12; H01L21/336; H01L21/28; H01L29/78
Attorney, Agent or Firm:
Hidetoshi Yoshitake
Takahiro Arita
Takahiro Arita