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Title:
半導体装置
Document Type and Number:
Japanese Patent JPWO2013172140
Kind Code:
A
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Inventors:
Ken-ichi Iguchi
Application Number:
JP2013061311
Publication Date:
January 12, 2016
Filing Date:
April 16, 2013
Export Citation:
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Assignee:
Fuji Electric Co., Ltd.
International Classes:
H01L29/12; H01L29/78; H01L21/336
Attorney, Agent or Firm:
Akinori Sakai



 
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