Title:
VERTICAL HEAT TREATING EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2003/085712
Kind Code:
A1
Abstract:
Vertical heat treating equipment (1), comprising a shutter device (17) shielding a load port (4) when a processed substrate (W) is taken out from the load port (4) of a processing chamber (5), the shutter device (17) further comprising a port cover (18) selectively closing the load port (4) of the processing chamber (5), wherein the port cover (18) is driven by a drive part having an extension arm (19) supporting and moving the port cover (18), and the drive part linearly moves the port cover (18) through the extension arm (19) between a closing position (PB) for closing the load port (4) and a wait position (PA) on the side of the closing position (PB).
Inventors:
HONMA MANABU
Application Number:
PCT/JP2003/003476
Publication Date:
October 16, 2003
Filing Date:
March 20, 2003
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/22; H01L21/00; H01L21/205; H01L21/324; (IPC1-7): H01L21/22
Foreign References:
| JPH04157162A | 1992-05-29 |
Attorney, Agent or Firm:
Suzuye, Takehiko c/o SUZUYE & SUZUYE (7-2 Kasumigaseki 3-chom, Chiyoda-ku Tokyo, JP)
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