Title:
重合体粒子を含有する研磨剤
Document Type and Number:
Japanese Patent JP4366735
Kind Code:
B2
Abstract:
The polymer particles of the invention are characterized by being obtained by polycondensation of at least one from among Compound 1 represented by general formula (1), its hydrolysates and its partial condensates, and at least one from among Compound 2 represented by general formula (2), its hydrolysates and its partial condensates, and by having a mean particle size of 3-1000 nm. M(OR<1>)z (R<2>)nM(OR<3>)z-n where M is Al, Si, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Ge, Zr, Nb, Mo, Sn, Sb, Ta, W, Pb or Ce; z is the atomic valence of M; R<1> and R<3> are each an alkyl group of 1-5 carbon atoms, an acyl group of 1-6 carbon atoms or an aryl group of 1-9 carbon atoms; R<2> is a monovalent organic group of 1-8 carbon atoms; n is an integer of from 1 to (z-2); and R<1>, R<2> and R<3> may be the same or different.
Inventors:
Masayuki Hattori
Masayuki Motonari
Akira Iio
Masayuki Motonari
Akira Iio
Application Number:
JP31473998A
Publication Date:
November 18, 2009
Filing Date:
November 05, 1998
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
C08J5/14; C09K3/14; C08G77/02; C08G77/04; C08G77/58; C08G79/00; C08G79/10; C08G79/12; C09G1/02
Domestic Patent References:
| JP7140472A | ||||
| JP1145317A | ||||
| JP9059384A | ||||
| JP9255783A |
Foreign References:
| WO1989012082A1 |
Attorney, Agent or Firm:
Kiyoshi Kojima