PURPOSE: To make possible to carry out precise fabrication, by covering the upper section of a carbon film with a thin film of lubricant having a thickness which is less than at least the particle size of diamond grain contained in the carbon film.
CONSTITUTION: By sputtering a carbon target with the use of an ion beam of mixture gas consisting of inert gas and hydrogen gas, a carbon film 12 includ ing diamond grain having a particle size of amount 5μm, is formed on a base member 14 arranged in parallel with the ion beam. Then, a carbon target is generated from an ion beam source in the atmosphere of hydrogen to form a lubricant film 13, and thereafter, the outer surface of the lubricant film 13 is ground with the use of a grinding member until the diamond grain 11 is exposed at the outer surface of the lubricant film.
KITAHATA MAKOTO
YAMAZAKI OSAMU
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