Title:
加速度計
Document Type and Number:
Japanese Patent JP5184880
Kind Code:
B2
Abstract:
The accelerometer has a base ( 2 ), an outer planar ring-like support frame ( 17 ) fixedly bonded to the base ( 2 ), and an inner planar ring-like support frame ( 18 ) flexibly suspended within the outer frame ( 17 ) by mounts ( 19 ) connecting the inner frame ( 18 ) to the outer frame ( 17 ) so that the inner frame ( 18 ) is spaced from the base ( 2 ), co-planar with the outer support fram ( 17 ) so as to provide flexible suspension for the inner support frame ( 18 ) reducing compressive and/or tensile forces on mounting legs ( 4 ) flexibly mounting a proof mass ( 3 ) in the inner support frame ( 18 ).
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Inventors:
Malvern, Alan Richard
Application Number:
JP2007500281A
Publication Date:
April 17, 2013
Filing Date:
February 22, 2005
Export Citation:
Assignee:
Atlantic Inertial Systems Limited
International Classes:
G01P15/13; G01P1/00; G01P15/08; G01P15/125; H01L29/84
Domestic Patent References:
| JP815308A | ||||
| JP918017A | ||||
| JP2003519797A | ||||
| JP8510837A | ||||
| JP200141973A | ||||
| JP2134570A | ||||
| JP6291334A | ||||
| JP7159435A | ||||
| JP6109757A |
Attorney, Agent or Firm:
Kurata Masatoshi
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Morisezo Iseki
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Morisezo Iseki
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori