Title:
ACTUATOR AND INK-JET RECORDING HEAD
Document Type and Number:
Japanese Patent JP3803472
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an actuator which can prevent the generation of peeling or cracking at the end of a piezoelectric material active part and an ink-jet recording head.
SOLUTION: In an actuator equipped with a piezoelectric oscillator consisting of oscillation plates 50, 60 having at least upper electrodes on the upper surfaces, piezoelectric material layers 70 formed on the surfaces of oscillating plates 50, 60, and upper electrodes 80 formed on the surface of the layers 70, an area near the end of a piezoelectric material active part 320 and up to a position at least about three times the thickness of the layer 60 from the end is made an inactive part, and displacement at the end is eliminated completely when voltage is applied to the active part 320 so that the generation of peeling and cracking at the end and the like are prevented.
Inventors:
Mari Sakai
Application Number:
JP28067697A
Publication Date:
August 02, 2006
Filing Date:
October 14, 1997
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
B41J2/045; B41J2/055; H01L41/09; (IPC1-7): B41J2/045; B41J2/055; H01L41/09
Domestic Patent References:
| JP8230184A | ||||
| JP7162054A | ||||
| JP9156098A | ||||
| JP8112896A | ||||
| JP9156097A |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Fujitsuna Hideyoshi
Osamu Suzawa
Fujitsuna Hideyoshi
Osamu Suzawa
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