Title:
ADJUSTING METHOD FOR CHARACTERISTIC ON ENERGY CONFINEMENT-TYPE PIEZOELECTRIC VIBRATING GYROSCOPE
Document Type and Number:
Japanese Patent JP3398854
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain an adjusting method in which a resonant frequency and a detection output can be adjusted by trimming at least one or more electrodes out of a first electrode as well as a second electrode and a third electrode which are faced.
SOLUTION: A first electrode 11 is installed on the main face of a piezoelectric plate 10, and a second electrode 12 and a third electrode 13 are formed in such a way that they are parallel and that they are separated by a prescribed distance. The distance d1 between the electrode 11 and the electrode 12 and the distance d2 between the electrode 11 and the electrode 13 are equal so as to be designated as D. When the electrode 11 is trimmed by a laser beam 40, a resonant frequency frx in the x-direction is changed due to a change in the distance D, and a resonant frequency fry in the Y-direction is kept constant. The slight difference between the distance d1 and the distance d2 is adjusted by trimming the electrode 12 or 13 so as to become the same distance. When the distance d3 between the electrode 12 and the electrode 13 is changed by trimming any of them, the resonant frequency frx is kept constant, and the resonant frequency fry is changed. In addition, when the length of opposite sides of the electrodes 12, 13 is changed, a detection output can be adjusted. By this method, the resonant frequencies and the detection output can be adjusted.
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Inventors:
Hiroshi Abe
Tetsuo Yoshida
Tetsuo Yoshida
Application Number:
JP30613496A
Publication Date:
April 21, 2003
Filing Date:
November 18, 1996
Export Citation:
Assignee:
NEC Tokin Co., Ltd.
International Classes:
G01C25/00; G01C19/56; G01C19/5698; G01P21/02; (IPC1-7): G01C19/56; G01C25/00; G01P9/04; G01P21/02
Domestic Patent References:
| JP10148526A | ||||
| JP10148525A | ||||
| JP1068625A | ||||
| JP1047967A | ||||
| JP5322580A |
Attorney, Agent or Firm:
Yosuke Goto (2 outside)