Title:
被洗浄物乾燥用エアーナイフ
Document Type and Number:
Japanese Patent JP4235144
Kind Code:
B2
More Like This:
| JP7055658 | Board processing equipment |
| JP2009529246 | Polishing head for polishing semiconductor wafers |
| JP2005349265 | MIST COLLECTOR |
Inventors:
Sonoda Haruki
Kazuhiro Takishita
Naoya Hirano
Takehiro Hagiwara
Kazuhiro Takishita
Naoya Hirano
Takehiro Hagiwara
Application Number:
JP2004145927A
Publication Date:
March 11, 2009
Filing Date:
May 17, 2004
Export Citation:
Assignee:
Shimada Rika Co., Ltd.
International Classes:
H01L21/304; H05H1/24; B08B5/02; B08B7/00; F26B5/14; F26B15/12
Domestic Patent References:
| JP2004063201A | ||||
| JP2003027210A | ||||
| JP2002009037A | ||||
| JP2002237480A | ||||
| JP6265864A | ||||
| JP2001284777A |
Attorney, Agent or Firm:
Shigeru Fujiyoshi
Previous Patent: 水性樹脂組成物及びその用途
Next Patent: 1-ALKYL-, 1-ALKENYL-, AND 1-ALKINYL ARYL-2-AMINO-1,3-PROPANEDIOL AND RELATED COMPOUND
Next Patent: 1-ALKYL-, 1-ALKENYL-, AND 1-ALKINYL ARYL-2-AMINO-1,3-PROPANEDIOL AND RELATED COMPOUND