To provide a technique where splashes generated upon film deposition using an Al-Ni-La system Al-based alloy sputtering target comprising Ni and La can be reduced.
The invention relates to an Al-Ni-La system Al-based alloy sputtering target comprising Ni and La, wherein, when a section from (1/4)t to (3/4)t (t: thickness) in a cross section vertical to a plane of the sputtering target is observed with a scanning electron microscope at a magnification of 2,000 times, (1) a total area of an Al-Ni system intermetallic compound having an average particle diameter of 0.3 to 3 m with respect to a total area of the entire Al-Ni system intermetallic compound is 70% or more in terms of an area fraction, the Al-Ni system intermetallic compound being mainly composed of Al and Ni; and (2) a total area of an Al-La system intermetallic compound having an average particle diameter of 0.2 to 2 m with respect to a total area of the entire Al-La system intermetallic compound is 70% or more in terms of an area fraction, the Al-La system intermetallic compound being mainly composed of Al and La.
TAKAGI KATSUHISA
KUGIMIYA TOSHIHIRO
YONEDA YOICHIRO
GOTO YASUSHI
KOBE STEEL LTD
Tadashi Sugakawa
Osamu Futakuchi
Hiroaki Ito