ALIGNER AND MANUFACTURE OF SEMICONDUCTOR DEVICE

Title:

ALIGNER AND MANUFACTURE OF SEMICONDUCTOR DEVICE

Document Type and Number:

Japanese Patent JP3526780

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide an aligner which is capable of easily positioning a mirror to a silicon ball, successively forming transfer patterns, and advantageous in a reducing the size of an IC.
SOLUTION: An aligner is equipped with a slit 3, which turns down light emitted from a lighting optical system to a long and thin slit light, a stage which supports a mask which receives the slit light and turns it to light corresponding to a transfer pattern in a manner where the mask is freely moved in a direction vertical to an optical axis, a reduction projection lens 6 which reduces light from the mask, a beam expander 7 which enlarges light that passes through the reduction projection lens, a condensing mirror 9 which concentrates light from the beam expander on the semiconductor ball 10, and a means which holds the semiconductor ball in a rotatable manner.

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Inventors:

Takeuchi, Kenichi

Application Number:

JP10745699A

Publication Date:

May 17, 2004

Filing Date:

April 15, 1999

Export Citation:

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Assignee:

MIYAZAKI OKI ELECTRIC CO LTD
OKI ELECTRIC IND CO LTD

International Classes:

H01L21/027; G03F7/20; G03F7/24; (IPC1-7): H01L21/027; G03F7/24

Attorney, Agent or Firm:

大西健治

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