Title:
AMMONIA AND HYDROGEN COLLECTION METHOD AND AMMONIA AND HYDROGEN RECYCLING METHOD
Document Type and Number:
Japanese Patent JP2014124584
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method of efficiently collecting and recycling both ammonia and hydrogen from exhaust gas that is discharged from a gallium nitride-based compound semiconductor manufacturing process and that contains ammonia, hydrogen, and nitrogen.SOLUTION: A pressurizing process and a cooling process by a heat pump are performed on exhaust gas that is discharged from a gallium nitride-based compound semiconductor manufacturing process and that contains ammonia, hydrogen, and nitride, thereby liquefying ammonia contained in the exhaust gas and collecting ammonia from the exhaust gas. Subsequently, hydrogen is collected from the exhaust gas containing hydrogen and nitride by pressure swing adsorption. The collected ammonia and hydrogen as described are supplied to the gallium nitride-based compound semiconductor manufacturing process and recycled.
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Inventors:
IZAKI HIROMASA
IWAKI MASANORI
AKIYAMA TOSHIO
IWAKI MASANORI
AKIYAMA TOSHIO
Application Number:
JP2012283236A
Publication Date:
July 07, 2014
Filing Date:
December 26, 2012
Export Citation:
Assignee:
JAPAN PIONICS
International Classes:
B01D53/58; B01D53/22; B01D53/46; B01D71/02; C01B3/56; C01C1/12; F25J1/00; H01L21/205
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