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Patent Searching and Data


Title:
ANGULE POLISHING JIG
Document Type and Number:
Japanese Patent JPH02188919
Kind Code:
A
Abstract:

PURPOSE: To obtain an angular polishing jig, for semiconductor use, which can select and simultaneously polish a plurality of angles by using one head by a method wherein a pasting face, of a material to be polished, of a head for polishing use is divided into two from the center of the head and has mutually different angles with reference to a horizontal face.

CONSTITUTION: This is an angule polishing jig provided with a circular head 1 for polishing use; and a pasting face, of a material to be polished, of said head 1 is divided into two from the center of the head 1 and has mutually different angles with reference to a horizontal face. Alternatively, two pasting faces of the material to be polished have a plurality of different angle faces inside respective faces. For example, as shown in the figure, this jug is formed as a polishing jig, for semiconductor use, provided with a head 1 having two angles which is designated as a two-way head or provided with a head 1 having four angles which is designated as a four-way head. Thereby, a maximum of four kinds of angles can be selected or polished simultaneously by using one head.


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Inventors:
ITO KAZUO
Application Number:
JP882989A
Publication Date:
July 25, 1990
Filing Date:
January 18, 1989
Export Citation:
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Assignee:
MATSUSHITA ELECTRONICS CORP
International Classes:
B23Q3/06; H01L21/304; (IPC1-7): B23Q3/06; H01L21/304
Attorney, Agent or Firm:
Akira Kobiji (2 outside)