To provide an apparatus and a method for generating ozone liquid where fall of ozone liquid concentration by flow rate fluctuation of liquid that is a raw material or leakage of gaseous ozone when the ozone liquid is discharged can be prevented in the ozone liquid generator and further flow-out of the ozone liquid through a gas return path and fall of a reutilization ratio of the gaseous ozone can be prevented in a circulation type ozone liquid generator.
The ozone liquid generation apparatus is provided with an ozone generator for generating gaseous ozone, a gas-liquid mixing unit for mixing the gaseous ozone and liquid to produce ozone liquid, a gas-liquid separation unit for carrying out gas-liquid separation of the ozone liquid, a liquid introducer for introducing liquid to the gas-liquid mixing unit, a liquid flow rate detector for detecting a liquid flow rate into the gas-liquid mixing unit and a controller for controlling operation of the ozone generator and the liquid introducer on the basis of the liquid flow rate detected by the liquid flow rate detector.
WATANABE KEIICHIRO
OZAKI MASAAKI
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Katsuya Mizukata