ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY DEVICE AND ITS MANUFACTURE METHOD

Title:

ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY DEVICE AND ITS MANUFACTURE METHOD

Document Type and Number:

Japanese Patent JP2004163901

Kind Code:

A

Abstract:

To provide a high quality liquid crystal display device which has improved operation performance and causes no defective picture quality.

In the array substrate for liquid crystal display device and its manufacture method, metal lines such as gate lines and data lines constituting the array substrate is composed of a double layer of copper/molybdenum alloy. In such a constitution, a failure such as the lifting of the copper layer does not occur because the contact property of the copper layer is improved by virtue of the molybdenum alloy layer deposited under the copper layer at first and, moreover, such a phenomenon that the surface of the substrate is corroded by a in-process etching solution which etches the double layer does not occur. Further, the use of the molybdenum alloy affords more excellent chemical resistance as compared to the case that only the molybdenum layer is used and, therefore, such a failure that the layer is over-etched under the copper layer does not occur. Therefore, the defective unevenness caused by the corrosion of the substrate surface is eliminated and, as a result, the high-definition liquid crystal display device can be manufactured. Furthermore, the failure such as the lifting of the lines can be prevented and the product yield is improved.

Inventors:

O-NAMU KWON
KYON-MUKU RI
NAKU-BON CHE

Application Number:

JP2003301679A

Publication Date:

June 10, 2004

Filing Date:

August 26, 2003

Export Citation:

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Assignee:

LG PHILIPS LCD CO LTD

International Classes:

G02F1/136; G02F1/1343; G02F1/1345; G02F1/1362; G02F1/1368; H01L21/28; H01L21/3205; H01L21/77; H01L21/84; H01L23/52; H01L27/12; H01L29/423; H01L29/49; H01L29/786; (IPC1-7): G02F1/1368; G02F1/1343; G02F1/1345; H01L21/28; H01L21/3205; H01L29/423; H01L29/49; H01L29/786

Domestic Patent References:

JPH04365012A	1992-12-17
JP2001013523A	2001-01-19
JPH1174537A	1999-03-16
JP2001059191A	2001-03-06
JPH10221702A	1998-08-21
JP2000208773A	2000-07-28

Attorney, Agent or Firm:

Michiteru Soga
Michiharu Soga
Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order

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