PURPOSE: To selectively convey an article reliably and automatically in the above device for a process of manufacturing a semiconductor device by turning a rotary disc having entering and delivering means in a designated degree arc to enter and deliver the article.

CONSTITUTION: An assembly A is transferred from transport means 124a to endless belts 88aW88d of an article transport direction select device 20. The endless belts 88aW88d are driven of an arrow 126 to move the assembly A until article detection means 108 is operated. Secondly, according to a signal of detection means 8, the assembly is regulated in position, with the leading edge brought into contact with a regulating pin 118 of entry position regulating means 110, and then the belts 88aW88b are stopped. Subsequently, a rotary disc 32 is turned in designated direction in a designated degree arc. If the assembly is conveyed to conveying means 124c without reversing the leading and trailing edges, the rotary disc is turned counter-clockwise in a 90° arc and the belts 88aW88d are driven. Thus, the transport direction can be automatically selected.