Title:
ATOMIC FORCE MICROSCOPE
Document Type and Number:
Japanese Patent JP2011196724
Kind Code:
A
Abstract:
To provide an atomic force microscope which can measure a shape of a measuring object having no rigidity, with high accuracy.
The atomic force microscope 100 includes a cantilever 130 having a probe 142 at the tip, a support 110 supporting the cantilever 130, and a vibration generating part 120 giving vibration to the cantilever 130. The cantilever 130 has a base end side part 132 positioned on the base end side and a probe side part 136 positioned on the probe side. The probe end side part 136 extends from the base end side part 132 by being bent. The base end side part 132 and the probe side part 136 have natural frequencies, one having the natural frequency of an integer multiple of that of the other.
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Inventors:
YOSHII TOSHIHIRO
Application Number:
JP2010061587A
Publication Date:
October 06, 2011
Filing Date:
March 17, 2010
Export Citation:
Assignee:
OLYMPUS CORP
International Classes:
G01Q60/38; G01Q20/02; G01Q60/24
Attorney, Agent or Firm:
Kurata Masatoshi
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Katsumura Hiro
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Takuzo Ichihara
Yamashita Gen
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Katsumura Hiro
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Takuzo Ichihara
Yamashita Gen