Title:
BLUB LIGHT EMITTING ELEMENT
Document Type and Number:
Japanese Patent JPS6297379
Kind Code:
A
Abstract:
PURPOSE:To form a blue light emitting element characterized by operation even at a low voltage, high efficiency and small dispersion in light emitting characteristics, by providing a through hole from the back surface of a single crystal substrate to a buffer layer, and providing a first electrode in a recess part, which is formed by removing a part of an exposed epitaxial layer. CONSTITUTION:On a GaP substrate 1, a buffer layer 2 is formed. After the supply of a raw material is temporarily stopped, a low-resistance, N-type ZnS epitaxial film 3 is formed. Then, an SiO2 insulating film 4 and a semi-transparent gold electrode 5 is formed. Thereafter, a through hole 6 is provided from the back side of the substrate 1 to the buffer layer 2. A recess part 7, which has about the same size as that of the hole, is formed in the exposed epitaxial layer 3. An In electrode 8 is provided. In the low-resistance, N-type ZnS film 3, doner impurities such as chlorine, iodine and Al are doped. When a DC power source on the side of an Au electrode 5 is supplied, the obtained element emits intense blue light at a peak wavelength of 460nm.
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Inventors:
MUTO RIEKO
Application Number:
JP23793685A
Publication Date:
May 06, 1987
Filing Date:
October 24, 1985
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H01L33/12; H01L33/20; H01L33/28; H01L33/30; H01L33/34; H01L33/40; (IPC1-7): H01L33/00
Attorney, Agent or Firm:
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